H2 Hydrogen flow meter MF5000 Series Gas Flow Meters
MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control.
The series can measure gas flow in a pipe diameter as small as 3 mm,but not over 19 mm. With the self-flow conditioning feature of the
MEMS sensor package, the meters feature an extremely low pressure
loss compared to the traditional by-pass thermal mass flow meters
in this application scope. The accuracy of the meters are generally
±(1.5+0.2FS)% or better depending on the requests. The meters can
work at an environment of -20 to 60 C and pressure up to 1.5 MPa.
Applications include semiconductor gas process monitoring and
control, hospital oxygen gas monitoring, etc.
Product features: H2 Hydrogen flow meter MF5000 Series Gas Flow Meters
- Using MEMS chip processing technology and LSI production
technology and material growth technology, the size of the sensor
is reduced to micron level, which greatly improves the sensitivity
of the flow meter.
- Multiple sensors are integrated on a single chip, greatly
improving the range ratio (range) of the flowmeter.
- The zero point stability of the sensor is greatly improved
compared with the traditional thermal mass flowmeter.
- Combined with the intelligent technology of microcomputer of the
secondary instrument, the flowmeter has good repeatability, and the
measurement is accurate and reliable.
- The simplified structure brought about by technological progress
greatly reduces the pressure loss and energy consumption of the
flowmeter compared with traditional mechanical instruments.
- LCD display "instantaneous flow" and "cumulative flow", clear and
intuitive, easy reading.
- The product integrates electromagnetic compatibility design
technology with higher anti-interference capability.
- The flow meter is equipped with RS485 communication module, which
can realize centralized management with upper computer network.
- 4 ~ 20mA standard current signal output is optional.
H2 Hydrogen flow meter MF5000 Series Gas Flow Meters
Accuracy of + / - (1.5 + 0.2 FS) %
Measuring range: 0.01~65m/ SEC
Measure pipe diameter 1~19 mm
Operating ambient temperature: -20~65
Display instantaneous flow rate;The cumulative flow
Output mode 4~20mA;RS485; pulse
Calibration condition 20oC;101.325 kPa.
