High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~
25slpm
Description
The MF4001 mass flow sensors utilize Shelok's proprietary MEMS flow
sensor and package technology to deliver exceptional performance.
These sensors are specifically designed for applications requiring
low flow rates, ranging from 030 sccm up to 01000 sccm. Each model
is carefully manufactured with a specially designed package and
smart electronics to achieve optimal sensitivity and accuracy.
The packaging enclosure of the sensors is constructed using
chemically inert and thermally stable polycarbonate material. This
ensures durability and reliability in various operating conditions.
The sensors are capable of withstanding a maximum overpressure
rating of 5 bar (73 psi), thanks to Shelok's unique MEMS sensor
chip structure, specialized packaging technology, and the robust
sensor housing.
In summary, the MF4001 mass flow sensors from Shelok combine
advanced MEMS technology with innovative packaging solutions. They
are specifically designed for low flow rate applications, offering
precise and reliable measurements. The sensors' rugged construction
and high overpressure rating make them suitable for demanding
environments, ensuring long-term performance and durability.
Specification
| High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~
25slpm |
| Model | Value | Unit |
| Flow Range | 0~30, 100, 200, 500, 1000, or customer specified | sccm |
| Turn-down Ratio | >100:1 |
| Accuracy1 | ±(1.5+0.5 FS) | % |
| Repeat ability | ±0.25 | % Reading |
| Null Shift | ±30 | mV |
| Output Shift | ±0.2 | %/℃ |
| Response Time2 | 65 (Default, 4, 8, 16, 33, 131 selectable | ms |
| Output | Linear: I2C, Analog 0.5~4.5V DC |
| Pressure Drop3 | <350 | Pa |
| Pressure Range | -0.08 ~ +0.5 | MPa |
| Power Supply4 | 8~24 V DC, 20mA |
| Power Consumption | <120 | mW |
| Working Temperature | -10 ~ +55 | ℃ |
| Pins Out | 5 Pin, 2.54mm centers, 0.635 mm square |
| Calibration5 | Air @ 20℃, 101.325 kPa |
| Packaging Material | Polycarbonate |
| Dimensions | 62×52×12.8 | mm3 |
| Weight | 15 | g |
| Storage Temperature | -20 ~ +65 | ℃ |
| Humidity | <95 % RH (No icing or condensation |
Notes:
1. Denotes ±(1.5% Reading+0.5% Full Scale). To obtain accurate flow
measurement, let the sensor warm up 1 minute at power up.
2. The response time is determined by ADC Sampling rate and data
process algorithm. The default response time is 65 ms. It can be
programmed via RS232 communication.
3. The maximum pressure drop is measured at flow rate 1000 sccm. For
500 sccm flow sensors, the pressure drop will be smaller. For 30,
100 and 200 sccm flow sensors, the flow pipe will be smaller, and
the maximum pressure drop is <20 Pa at flow rate 200 sccm.
4. One DC power supply is necessary. The required minimum output
current is 50mA. The sensor actually consumes less than that in
operation.
5. Calibrations at other gases available upon request.
Detailed Images
Mechanical Dimensions
Sensor Selection
Features
! Low mass flow range from 0~30 sccm up to 0~1000sccm
! Outstanding Accuracy of ±1.5%
! Fast response (4 ms selectable)
! R Pressure rating up to 5 bar (73 psi)
! Analog and / or digital user interface
! Easy installation
Applications
The versatile MF4001 mass flow sensor finds applications in a wide
range of industries, including instrumentation such as GC mass
spectrometry, leak detection, process control, gas flow metrology,
and medical applications. It offers flexibility and reliability for
various measurement needs.
The MF4001 operates on a power supply of 8~24V DC and features both
analog and digital user interfaces. The analog output provides a
linearized signal ranging from 0.5 to 4.5V DC, corresponding to the
flow rate from 0 to full scale. The digital output is available
through RS232 or I2C protocols, allowing for convenient data
transmission and integration with other systems. Detailed
communication protocols for RS232 and I2C can be found in the
provided manual.
The sensor's calibration is typically performed using nitrogen gas
at a standard temperature of 20℃ and pressure of 101.325kPa.
However, upon request, the MF4001 can be calibrated with other
gases and under different conditions to meet specific application
requirements. This customization ensures accurate measurements in
diverse operating environments.
Related products
FAQ
Q: How long will you reply me?
A: We will contact you as soon as possible but within 12 hours
Q: Can I get some samples?
A: Yes, Sample order is available for quality check and market
test. But you have to pay the express cost.
Q: How soon can you arrange your production?
A: Once getting your product confirmation and receiving the
prepayment, the production will be started immediately.
Q: What's delivery time?
A: It usually takes about 3-5 working days for small order and
10-15 days for big order.
Q: How do you control your quality ?
A: Three inspection steps(of original, production, and finished
goods) + good warranty service(1 year free to change a new one
without any human damage factors).
Q: What certificates do you have ?
A: ISO9000, CE, Explosion-proof certification, RoHs ready. And
before the delievry of goods, quality and safety inspection
certification issued by third parts also can be offered.
Q: Could I visit your factory?
A: Very welcome! Fly to Xian Yang air port. It was a big pleasure
for us.
Q: What's your warranty terms?
A: We offer 12 months warranty time.
Q: can you provide OEM & Customized service?
A: Yes, OEM and ODM are both available, we have the professional
R&D dept which can provide professional solutions for you.
