High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~
25slpm
Description
The MF4001 mass flow sensors from Shelok are engineered with
cutting-edge MEMS technology for unparalleled performance. Ideal
for applications needing precise measurement of low flow rates,
from 030 sccm to 01000 sccm, these sensors boast a bespoke package
and advanced electronics for heightened sensitivity and accuracy.
The housing is made of chemically resistant and thermally stable
polycarbonate, ensuring steadfastness under various conditions.
With a high overpressure limit of 5 bar (73 psi), these sensors can
handle tough environments, promising enduring reliability.
Specification
| High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~
25slpm |
| Model | Value | Unit |
| Flow Range | 0~30, 100, 200, 500, 1000, or customer specified | sccm |
| Turn-down Ratio | >100:1 |
| Accuracy1 | ±(1.5+0.5 FS) | % |
| Repeat ability | ±0.25 | % Reading |
| Null Shift | ±30 | mV |
| Output Shift | ±0.2 | %/℃ |
| Response Time2 | 65 (Default, 4, 8, 16, 33, 131 selectable | ms |
| Output | Linear: I2C, Analog 0.5~4.5V DC |
| Pressure Drop3 | <350 | Pa |
| Pressure Range | -0.08 ~ +0.5 | MPa |
| Power Supply4 | 8~24 V DC, 20mA |
| Power Consumption | <120 | mW |
| Working Temperature | -10 ~ +55 | ℃ |
| Pins Out | 5 Pin, 2.54mm centers, 0.635 mm square |
| Calibration5 | Air @ 20℃, 101.325 kPa |
| Packaging Material | Polycarbonate |
| Dimensions | 62×52×12.8 | mm3 |
| Weight | 15 | g |
| Storage Temperature | -20 ~ +65 | ℃ |
| Humidity | <95 % RH (No icing or condensation |
Notes:
1. Denotes ±(1.5% Reading+0.5% Full Scale). To obtain accurate flow
measurement, let the sensor warm up 1 minute at power up.
2. The response time is determined by ADC Sampling rate and data
process algorithm. The default response time is 65 ms. It can be
programmed via RS232 communication.
3. The maximum pressure drop is measured at flow rate 1000 sccm. For
500 sccm flow sensors, the pressure drop will be smaller. For 30,
100 and 200 sccm flow sensors, the flow pipe will be smaller, and
the maximum pressure drop is <20 Pa at flow rate 200 sccm.
4. One DC power supply is necessary. The required minimum output
current is 50mA. The sensor actually consumes less than that in
operation.
5. Calibrations at other gases available upon request.
Detailed Images
Mechanical Dimensions
Sensor Selection
Features
! Low mass flow range from 0~30 sccm up to 0~1000sccm
! Outstanding Accuracy of ±1.5%
! Fast response (4 ms selectable)
! R Pressure rating up to 5 bar (73 psi)
! Analog and / or digital user interface
! Easy installation
Applications
The MF4001 series mass flow sensors by Shelok harness MEMS
technology for exceptional performance. Designed for precision at
low flow rates, from 030 sccm to 01000 sccm, these sensors
integrate a tailored enclosure with sophisticated electronics for
enhanced sensitivity and accuracy. Constructed with polycarbonate,
the housing resists chemicals and maintains stability across
temperature variations. Their robust design withstands up to 5 bar
(73 psi) overpressure, making them dependable in harsh settings.
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